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Growth by low pressure chemical vapor deposition of silicon quantum dots on insulator for nanoelectronics devices

Author(s):
Baron, T.
Martin, F.
Mur, P.
Wyon, C.
Dupuy, M.
Bussert, C.
Souifi, A.
Guillot, G.
3 more
Publication title:
Semiconductor quantum dots : symposium held April 5-8, 1999, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
571
Pub. Year:
2000
Page(from):
37
Pub. info.:
Warrendale, PA: MRS-Materials Research Society
ISSN:
02729172
ISBN:
9781558994782 [1558994785]
Language:
English
Call no.:
M23500/571
Type:
Conference Proceedings

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