MOCVD of Nb substituted SrBi2TaO9 for integrated ferroelectric capacitors

MOCVD of Nb substituted SrBi2TaO9 for integrated ferroelectric capacitors

Author(s):

Publication title:

Ferroelectric thin films VIII : symposium held November 29-December 2, 1999, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

596

Pub. Year:

2000

Page(from):

143

Pub. info.:

Warrendale, PA: MRS-Materials Research Society

ISSN:

02729172

ISBN:

9781558995048 [1558995048]

Language:

English

Call no.:

M23500/596

Type:

Conference Proceedings

Details

TDL ID:	ZA00019433
Series ID:	PA00000011
Conf. info. (Name):	Ferroelectric Thin Films : Symposium
Conf. info. (Number):	8th
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1999.11.29-1999.12.02

Similar Items:

1 Conference Proceedings MOCVD of SrBi2Ta2O9 for Integrated Ferroelectric Capacitors Hendrix, Bryan C., Hintermaier, Frank, Desrochers, Debra A., Roeder, Jeffrey F., Bhandari, Gautam, Chappuis, Maggie, … MRS - Materials Research Society	7 Conference Proceedings Ferroelectric Properties in Ca Substituted SrBi2Nb2O9 Thin Films Das, Rasmi R., Perez, W., Bhattacharya, P., Katiyar, Ram S. Materials Research Society
2 Conference Proceedings Correlations Between Composition, Texture, and Polarization in SrxBiyTa2O5+x+3y/2 Thin Films Deposited by MOCVD Hendrix, B. C., Hintermaier, F., Desrochers, D. A., Roeder, J. F., Baum, T. H., Dehm, C., Nagel, N., Honlein, W., … MRS - Materials Research Society	8 Conference Proceedings Properties of Zr-substituted (Ba, Sr)TiO3 thin films for integrated capacitors Stauf, G. T., Chen, P. S., Paw, W., Roeder, J. F., Ayguavives, T., Maria, J-P., Kingon, A. I. MRS-Materials Research Society
3 Conference Proceedings Comparison Of MOCVD Precursors For Hf1-xSixO2 Gate Dielectric Deposition Hendrix, B.C., Borovik, A.S., Wang, Z., Xu, C., Roeder, J.F., Baum, T.H., Bevan, M.J., Visokay, M.R., Chambers, J.J., … Materials Research Society	9 Conference Proceedings High Purity Silicon Amido Precursors For Low Temperature Cvd Of High k Gate Silicates Borovik, A.S., Xu, C., Hendrix, B.C., Roeder, J.F., Baum, T.H. Materials Research Society
4 Conference Proceedings Liquid Delivery MOCVD of Ferroelectric PZT Roeder, J. F., Vaartstra, B. A., Buskirk, P. C. Van, Beratan, H. R. MRS - Materials Research Society	10 Conference Proceedings Electronic Structure of the Layered Ferroelectric Perovskite SrBi2Ta2O9 Robertson, J., Chen, C. W., Warren, W. L. MRS - Materials Research Society
5 Conference Proceedings Stress Evolution in Integrated SrBi2Ta2O9 Ferroelectric Layers Lisoni, J. G., Wafer, K., Johnson, J. A., Goux, L., Schwitters, M., Paraschiv, V., Maes, D., Haspeslagh, L., Caputa, C., … Materials Research Society	11 Conference Proceedings Ferroelectric SrBi2Ta2O9 thin films made by one-and two-step metalorganic chemical vapor deposition Li,T., Stall,R.A., Zhu,Y., Desu,S.B., Peng,C.-H. SPIE-The International Society for Optical Engineering
6 Conference Proceedings Transmission electron microscopy study of domain structures in ferroelectric SrBi2Nb2O9 ceramics Karthik, C., Ravishankar, N., Varma, K. B. R. Materials Research Society	12 Conference Proceedings Laser Annealing of Ferroelectric SrBi2Ta2O9, Pb(ZrxTi1-x)O3 and CeMnO3 Thin Films Sbrockey, N. M., Cuchiaro, J. D., Provost, L. G., Rice, C. E., Sun, S., Tompa, G. S., DeLeon, R. L., Kalkur, T. S. Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12