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Narrow resonance profiling study of the oxidation of Ti1-xAlN barrier layer

Author(s):
Hugon, M. C.
Desvignes, J. M.
Letendu, F.
Agius, B.
Vickridge, I.
Kim, D. J.
Ayguavives, F.
Kingon, A. I.
3 more
Publication title:
Ferroelectric thin films VIII : symposium held November 29-December 2, 1999, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
596
Pub. Year:
2000
Page(from):
97
Pub. info.:
Warrendale, PA: MRS-Materials Research Society
ISSN:
02729172
ISBN:
9781558995048 [1558995048]
Language:
English
Call no.:
M23500/596
Type:
Conference Proceedings

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