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Effect of TiN treated by rapid thermal annealing on properties of BST capacitors prepared by RF magnetron Co-sputter system at low substrate temperature

Author(s):
Teng, T. H.
Hwang, C. C.
Lai, M. J.
Huang, S. C.
Chen, J. S.
Jaing, C. C.
Cheng, H. C.
2 more
Publication title:
Ferroelectric thin films VIII : symposium held November 29-December 2, 1999, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
596
Pub. Year:
2000
Page(from):
37
Pub. info.:
Warrendale, PA: MRS-Materials Research Society
ISSN:
02729172
ISBN:
9781558995048 [1558995048]
Language:
English
Call no.:
M23500/596
Type:
Conference Proceedings

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