MICROSTRUCTURAL EVOLUTION AND STRESS RELAXATION IN SPUTTERED TUNGSTEN FILMS

MICROSTRUCTURAL EVOLUTION AND STRESS RELAXATION IN SPUTTERED TUNGSTEN FILMS

Author(s):

Publication title:

Interface control of electrical, chemical, and mechanical properties : symposium held November 29-December 3, 1993, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

318

Pub. Year:

1994

Page(from):

697

Pub. info.:

Pittsburgh: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558992177 [1558992170]

Language:

English

Call no.:

M23500/318

Type:

Conference Proceedings

Details

TDL ID:	ZA00019388
Series ID:	PA00000011
Conf. info. (Name):	Symposium on interface control of electrical, chemical, and mechanical properties
Conf. info. (Number):	1993
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1993.11.29-1993.12.03

Similar Items:

1 Conference Proceedings Quantitative Experimental Determination of the Effect of Dislocation-Dislocation Interactions on Strain Relaxation in Lattice Mismatched Heterostructures Stach, E. A., Hull, R., Tromp, R. M., Ross, F. M., Reuter, M. C., Bean, J. C. MRS - Materials Research Society	7 Conference Proceedings *KINETIC BARRIERS TO STRAIN RELAXATION IN GexSi1-x/Si EPITAXY Hull, R., Bean, J.C. Materials Research Society
2 Conference Proceedings *CHANGES IN ELECTRONIC DEVICE PROPERTIES DURING THE FORMATION OF DISLOCATIONS Ross, F.M., Hull, R., Bahnck, D., Bean, J.C., Peticolas, L.J., Kola, R.R., King, C.A. Materials Research Society	8 Conference Proceedings Microstructural Development of Thin CoCrTa Films on Cr Underlayers Ross, C. A., Ross, F. M. MRS - Materials Research Society
3 Conference Proceedings CONTROL OF MICROSTRUCTURE AND STRESS IN SPUTTERED TUNGSTEN THIN FILMS ON SILICON Kola, R. R., Celler, G. K. Materials Research Society	9 Conference Proceedings STRESS, MICROSTRUCTURE AND MAGNETIC PROPERTIES OF THIN SPUTTERED Co ALLOY FILMS Ross, C. A., Ranjan, R., Chang, J. MRS - Materials Research Society
4 Conference Proceedings EXPERIMENTAL AND THEORETICAL ANALYSIS OF STRAIN RELAXATION IN GeXSi1-X/Si(100) HETEROEPITAXY Hull, R., Bean, J. C. Materials Research Society	10 Conference Proceedings Deposition Kinetics and Microstructural Evolution in Sputtered Ta Films: A Real-Time//n Situ Study Bilello, J. C., Whitacre, J. F., Yalisove, S. M. Materials Research Society
5 Conference Proceedings *THE ROLES OF STRESS, GEOMETRY AND ORIENTATION ON MISFIT DISLOCATIONS KINETICS AND ENERGETICS IN EPITAXIAL STRAINED LAYERS Hull, R., Bean, J. C., Ross, F., Bahnck, D., Peticolas, L. J. Materials Research Society	11 Conference Proceedings STRESS, MECHANICAL PROPERTIES AND COMPOSITION MEASUREMENTS IN SPUTTERED THICK ALUMINA FILMS Ross, C. A., Barrese, J. J. MRS - Materials Research Society
6 Conference Proceedings *STRAIN RELAXATION MECHANISMS IN LATTICE MISMATCHED EPITAXY Hull, R., Bean, J. C., Bonar, J. M., Paticolas, L. Materials Research Society	12 Conference Proceedings Stress Evolution in Ultra Thin Sputtered Films Su, Quanmin, Cammarata, R. C., Wuttig, Manfred MRS - Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12