INITIAL STAGE OF HETEROEPITAXIAL GROWTH OF SiC ON Si BY GAS SOURCE MBE USING HYDROCARBON RADICALS

INITIAL STAGE OF HETEROEPITAXIAL GROWTH OF SiC ON Si BY GAS SOURCE MBE USING HYDROCARBON RADICALS

Author(s):

Publication title:

Interface control of electrical, chemical, and mechanical properties : symposium held November 29-December 3, 1993, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

318

Pub. Year:

1994

Page(from):

201

Pub. info.:

Pittsburgh: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558992177 [1558992170]

Language:

English

Call no.:

M23500/318

Type:

Conference Proceedings

Details

TDL ID:	ZA00019388
Series ID:	PA00000011
Conf. info. (Name):	Symposium on interface control of electrical, chemical, and mechanical properties
Conf. info. (Number):	1993
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1993.11.29-1993.12.03

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