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CONTROL OF Si-SiO2 INTERFACE PROPERTIES IN MOS DEVICES PREPARED BY PLASMA-ASSISTED AND RAPID THERMAL PROCESSES

Author(s):
Lucovsky, G.
Yasuda, T.
Ma, Y.
Hattangady, S. V.
Xu, X-L.
Misra, V.
Hornung, B.
Wortman, J. J.
3 more
Publication title:
Interface control of electrical, chemical, and mechanical properties : symposium held November 29-December 3, 1993, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
318
Pub. Year:
1994
Page(from):
81
Pub. info.:
Pittsburgh: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992177 [1558992170]
Language:
English
Call no.:
M23500/318
Type:
Conference Proceedings

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