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Structural Characterization of nc-Si/a-SiO2 Superlattices Subjected to Thermal Treatment

Author(s):
Grom, G. F.
Tsybeskov, L.
Hirschman, K. D.
Fauchet, P. M.
McCaffrey, J. P.
Labbe, H. J.
Lockwood, D. J.
2 more
Publication title:
Microcrystalline and nanocrystalline semiconductors--1998 : symposium held November 30-December 3, 1998, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
536
Pub. date:
1999
Page(from):
141
Pub. info.:
Warrendale, PA: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558994423 [1558994424]
Language:
English
Call no.:
M23500/536
Type:
Conference Proceedings

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