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Simulation of Rapid Thermal Annealed Boron Ultrashallow Junctions in Inert and Oxidizing Ambient

Author(s):
Lerch, W.
Gluck, M.
Stolwijk, N. A.
Walk, H.
Schafer, M.
Marcus, S. D.
Downey, D. F.
Chow, J. W.
Marquardt, H.
4 more
Publication title:
Rapid thermal and integrated processing VII : symposium held April 13-15, 1998, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
525
Pub. Year:
1998
Page(from):
237
Pub. info.:
Pittsburgh, PA: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558994317 [1558994319]
Language:
English
Call no.:
M23500/525
Type:
Conference Proceedings

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