Structure and Mechanical Properties of Reactive Sputter-Deposited TiN/TaN Multilayered Films

Structure and Mechanical Properties of Reactive Sputter-Deposited TiN/TaN Multilayered Films

Author(s):

Soe, W-H.

Publication title:

Thin-films : stresses and mechanical properties VII : symposium held December 1-5, 1997, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

505

Pub. Year:

1998

Page(from):

463

Pub. info.:

Warrendale, Pa.: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558994102 [1558994106]

Language:

English

Call no.:

M23500/505

Type:

Conference Proceedings

Details

TDL ID:	ZA00019380
Series ID:	PA00000011
Conf. info. (Name):	Symposium on thin-films-stresses and mechanical properties
Conf. info. (Number):	7th
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1997.12.01-1997.12.05

Similar Items:

1 Conference Proceedings Structure and Mechanical Properties of Titanium Nitride, Zirconium Nitride, and Chromium Nitride Films by Reactive Magnetron-Sputter Deposition Soe, W-H., Kitagaki, T., Ueda, H., Shima, N., Otsuka, M., Yamamoto, R. MRS - Materials Research Society	7 Conference Proceedings Nano-Structured TiN Thin Films Deposited by Single Ion Beam Reactive Sputtering Z. Bogdanov, N. Popovic, M. Zlatanovic, B. Goncic, Z. Rakocevic, S. Zec Trans Tech Publications
2 Conference Proceedings Reactive-Sputter Deposition of TiN/ZrN and TiN/CrN Multilayers: Structural and Mechanical Properties Soe, W-H., Kitagaki, T., Ueda, H., Shima, N., Otsuka, M., Yamamoto, R. MRS - Materials Research Society	8 Conference Proceedings Structure and Mechanical Properties of AlCrN Thin Films Deposited by Magnetron Sputtering T.T.H. Pham, E. Le Bourhis, P. Goudeau, P. Guérin Trans Tech Publications
3 Conference Proceedings Perpendicular Magnetic Anisotropy and Magneto-Optical Properties of Sputtered RE-TM(CoGd)/Pd Multilayered Films Yang, T., Soe, W-H., Liu, B. X., Yamamoto, R. MRS - Materials Research Society	9 Conference Proceedings TRIBOLOGICAL AND MECHANICAL PROPERTIES OF Fe/Ti MULTILAYERED FILMS Nastasi, M., Hirvonen, J-P., Jervis, T. R., Basu, S. N. Materials Research Society
4 Conference Proceedings Structure Stability and Mechanical Property of Y₂O₃ Thin Films Deposited by Reactive Magnetron Sputtering P.F. Yu, K. Zhang, S.X. Du, P. Ren, M. Wen, W.T. Zheng Trans Tech Publications	10 Conference Proceedings Optical properties of thin films deposited by reactive-Rf-magnetron sputtering Yoshida,K., Kamimura,T., Ochi,K., Kaku,S., Yoshida,H., Fujita,H., Tani,F., Sunagawa,M., Okamoto,T. SPIE-The International Society for Optical Engineering
5 Conference Proceedings THE PERPENDICULAR MAGNETIC ANISOTROPY AND STRUCTURE OF SPUTTERED Ag/Co, Pd/Co, AND AgPd/Co MULTILAYERED FILMS Yamaguchi, Akira, Soe, We-Hyo, Yamamoto, Ryoichi, Kobayashi, Masonobu Materials Research Society	11 Conference Proceedings Optical properties and laser damage of thin films deposited by reactive rf-magnetron sputtering Yoshida,K., Tochio,N., Ohya,M., Ochi,K., Kaku,S., Kamimura,T., Yoshida,H. SPIE - The International Society for Optical Engineering
6 Conference Proceedings Properties of Indium Tin Oxide Deposited Using Reactive Closed Field Magnetron Sputtering D.R. Gibson, I.T. Brinkley, G.H. Hall, E.M. Waddell, J.M. Walls Society of Vacuum Coaters	12 Conference Proceedings Processing Effects on Structure-Property Relationships in Sputter Deposited Thin Gold Films Moody, N.R., Adams, D.P., Medlin, D., Headley, T., Yang, N. Trans Tech Publications

1

2

3

4

5

6

7

8

9

10

11

12