Influence of Target Structure on Film Stress in WTI Sputtering

Author(s):

• Lo, Chi-Fung
• Wang, Hong
• Gilman, Paul

Publication title:

Thin-films : stresses and mechanical properties VII : symposium held December 1-5, 1997, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

505

Pub. Year:

1998

Page(from):

427

Pub. info.:

Warrendale, Pa.: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558994102 [1558994106]

Language:

English

Call no.:

M23500/505

Type:

Conference Proceedings