Spectroscopic and Structural Studies of Some Precursors for the Deposition of PZT and Related Materials by MOCVD

Spectroscopic and Structural Studies of Some Precursors for the Deposition of PZT and Related Materials by MOCVD

Author(s):

Fleeting, Kirsty A.

Publication title:

Chemical aspects of electronic ceramics processing : symposium held November 30-December 4, 1997, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

495

Pub. Year:

1998

Page(from):

57

Pub. info.:

Warrendale, Pa.: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558994003 [1558994009]

Language:

English

Call no.:

M23500/495

Type:

Conference Proceedings

Details

TDL ID:	ZA00019379
Series ID:	PA00000011
Conf. info. (Name):	Symposium on chemical aspects of electronic ceramics processing
Conf. info. (Number):	1997
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1997.11.30-1997.12.04

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