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Low-Temperature Growth of Crystalline Silicon Thin Films by ECR Plasma CVD

Author(s):
Publication title:
Thin-film structures for photovoltaics : symposium held December 2-5, 1997, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
485
Pub. Year:
1998
Page(from):
83
Pub. info.:
Warrendale, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993907 [1558993908]
Language:
English
Call no.:
M23500/485
Type:
Conference Proceedings

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