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Low-Temperature Growth of Si:Er by Electron Cyclotron Resonance PECVD Using Metal Organics

Author(s):
Andry, P. S.
Varhue, W. J.
Adams, E.
Lavoie, M.
Klein, P. B.
Hengehold, R.
Hunter, J.
2 more
Publication title:
Rare earth doped semiconductors II : symposium held April 8-10, 1996, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
422
Pub. Year:
1996
Page(from):
57
Pub. info.:
Pittsburgh: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993259 [1558993258]
Language:
English
Call no.:
M23500/422
Type:
Conference Proceedings

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