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PECULIARITIES IN THE EPITAXIAL REGROWTH OF ION-IMPLANTED Si1-xGex ALLOY LAYERS GROWN ON COMPOSITIONALLY GRADED BUFFERS

Author(s):
Publication title:
Microstructure of irradiated materials : Symposium held November 29-1 December, 1994, Boston, Massachusetts USA
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
373
Pub. date:
1995
Page(from):
505
Pub. info.:
Pittsburgh, Pa: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992757 [1558992758]
Language:
English
Call no.:
M23500/373
Type:
Conference Proceedings

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