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FACET FORMATION OF LINESHAPED SILICON MESAS GROWN WITH MICRO SHADOW MASKS

Author(s):
Gossner, H.
Fehlauer, G.
Kiunke, W.
Eisele, I.
Stolz, M.
Hintermaier, M.
Knapek, E.
2 more
Publication title:
Molecularly designed ultrafine/nanostructured materials : symposium held April 4-8, 1994, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
351
Pub. date:
1994
Page(from):
393
Pub. info.:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992511 [1558992510]
Language:
English
Call no.:
M23500/351
Type:
Conference Proceedings

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