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HOT FILAMENT ASSISTED CVD OF TITANIUM NITRIDE FILMS

Author(s):
Publication title:
Covalent ceramics II : non-oxides : symposium held November 29 - December 2, 1993, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
327
Pub. Year:
1994
Page(from):
115
Pub. info.:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992269 [155899226X]
Language:
English
Call no.:
M23500/327
Type:
Conference Proceedings

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