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Fabrication of Si/Si1-xGex waveguide WDM components

Author(s):
Xu,D.-X. ( National Research Council Canada )
Janz,S.
Williams,R.L.
Allegretto,E.
Mailhot,S.
He,J.J.
Baribeau,J.-M.
Lafontaine,H.
Stapledon,J.
Fraser,J.W.
Robillard,M.R.
Jessop,P.E.
Kovacic,S.
8 more
Publication title:
Silicon-Based Monolithic and Hybrid Optoelectronic Devices
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3007
Pub. Year:
1997
Page(from):
178
Page(to):
188
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819424181 [0819424188]
Language:
English
Call no.:
P63600/3007
Type:
Conference Proceedings

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