Submicron calibration strategy for CD control
- Author(s):
- Chain,E.E. ( Motorola )
- Kulkens,L.
- Harris,T.A.
- Publication title:
- Process, Equipment, and Materials Control in Integrated Circuit Manufacturing II
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 2876
- Pub. Year:
- 1996
- Page(from):
- 250
- Page(to):
- 256
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819422743 [0819422746]
- Language:
- English
- Call no.:
- P63600/2876
- Type:
- Conference Proceedings
Similar Items:
SPIE - The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
2
Conference Proceedings
Precision process calibration and CD predictions for low-k1 lithography [5853-64]
SPIE - The International Society of Optical Engineering |
8
Conference Proceedings
CASE STUDIES OF LOCAL STRATEGIES FOR CONTROL OF NON-POINT SOURCE POLLUTION IN COLORADO (USA)
Kluwer Academic Publishers |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
4
Conference Proceedings
Implementation strategies and return on investment for integrated CD control
SPIE - The International Society of Optical Engineering |
10
Conference Proceedings
Emulsion Polymerization Kinetics: Chain Entanglements and Glassy-State Transition
American Chemical Society |
SPIE-The International Society for Optical Engineering |
11
Conference Proceedings
Influence of writing strategy on CD control for the spatial-light-modulator-based Sigma7300 DUV laser pattern generator
SPIE - The International Society of Optical Engineering |
ESA Publications Division |
ESA Publications Division |