Blank Cover Image

In-line electrical probe for CD metrology

Author(s):
Publication title:
Process, Equipment, and Materials Control in Integrated Circuit Manufacturing II
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2876
Pub. date:
1996
Page(from):
135
Page(to):
146
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819422743 [0819422746]
Language:
English
Call no.:
P63600/2876
Type:
Conference Proceedings

Similar Items:

John,L.D., Cosway,R.G., Griswold,M.D., Lamb,G.M.

SPIE-The International Society for Optical Engineering

Levenson,M.D.

SPIE-The International Society for Optical Engineering

Chain,E.E., Ridens,M.G., Annand,J.P.

SPIE-The International Society for Optical Engineering

Levenson,M.D.

SPIE-The International Society for Optical Engineering

Perng, B. C., Shieh, J. H., Jang, S. M., Liang, M.-S., Huang, R., Chen, L. C, Hwang, R. L., Hsu, J, Fong, D.

SPIE - The International Society of Optical Engineering

Levenson,M.D.

SPIE-The International Society for Optical Engineering

Jones, R.L., Hu, T., Soles, C.L., Lin, E.K., Wu, W.-, Casa, D.M., Mahorowala, A.

SPIE - The International Society of Optical Engineering

Levenson,M.D.

SPIE-The International Society for Optical Engineering

5 Conference Proceedings Accuracy in CD-SEM metrology

Nikitin, A.V., Sicignano, A., Yeremin, D.Y., Sandy, M., Goldburt, E.T.

SPIE-The International Society for Optical Engineering

H. Liu, J. R. Osborne, M. Osborn, G. A. Dahlen

SPIE - The International Society of Optical Engineering

6 Conference Proceedings Factors influencing CD-SEM metrology

Sicignano, A., Nikitin, A.V., Yeremin, D.Y., Sandy, M., Goldburt, E.T.

SPIE-The International Society for Optical Engineering

Tortonese, M., Lorusso, G., Blanquies, R.M., Prochazka, J., Grella, L.

SPIE - The International Society of Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12