Block and random copolymer resists designed for 193-nm lithography and environmentally friendly supercritical CO2 development
- Author(s):
- Gabor,A.H. ( Cornell Univ. )
- Allen,R.D.
- Gallagher-Wetmore,P.M.
- Ober,C.K.
- Publication title:
- Advances in resist technology and processing XIII : 11-13 March 1996, San Clara, California
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 2724
- Pub. Year:
- 1996
- Page(from):
- 410
- Page(to):
- 417
- Pub. info.:
- Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819421005 [0819421006]
- Language:
- English
- Call no.:
- P63600/2724
- Type:
- Conference Proceedings
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