Fabrication and performance characteristics of high-speed ion-implanted Si metal-semiconductor-metal photodetectors
- Author(s):
- Dutta,N.K. ( AT&T Bell Labs. )
- Nichols,D.T.
- Jacobson,D.C.
- Livescu,G.
- Publication title:
- Photodetectors : materials and devices : 1-2 February 1996
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 2685
- Pub. Year:
- 1996
- Page(from):
- 150
- Page(to):
- 158
- Pub. info.:
- Bellingham, WA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819420596 [081942059X]
- Language:
- English
- Call no.:
- P63600/2685
- Type:
- Conference Proceedings
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