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Fabrication and performance characteristics of high-speed ion-implanted Si metal-semiconductor-metal photodetectors

Author(s):
Publication title:
Photodetectors : materials and devices : 1-2 February 1996
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2685
Pub. date:
1996
Page(from):
150
Page(to):
158
Pub. info.:
Bellingham, WA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819420596 [081942059X]
Language:
English
Call no.:
P63600/2685
Type:
Conference Proceedings

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