
Prevention of auto-doping-induced threshold voltage shifts
- Author(s):
- Phan,T.T. ( Motorola )
- Healey,J.T.
- Kent,W.R.
- Publication title:
- Microelectronic Manufacturing Yield, Reliability, and Failure Analysis
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 2635
- Pub. date:
- 1995
- Page(from):
- 136
- Page(to):
- 144
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819420015 [0819420018]
- Language:
- English
- Call no.:
- P63600/2635
- Type:
- Conference Proceedings
Similar Items:
SPIE-The International Society for Optical Engineering |
Society of Photo-optical Instrumentation Engineers |
2
![]() Electrochemical Society |
SPIE-The International Society for Optical Engineering |
3
![]() SPIE - The International Society of Optical Engineering |
9
![]() SPIE-The International Society for Optical Engineering |
MRS - Materials Research Society |
SPIE - The International Society for Optical Engineering |
Materials Research Society |
Society of Plastics Engineers, Inc. (SPE) |
6
![]() SPIE-The International Society for Optical Engineering |
12
![]() Electrochemical Society |