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Optical properties and modeling of flash VUV-induced silicon oxynitride isotropic deposition that is water and hydroxyl free

Author(s):
Publication title:
Laser applications engineering (LAE-96) : 3-5 July, 1996, St. Petersburg-Pushkin, Russia
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3091
Pub. Year:
1997
Page(from):
72
Page(to):
82
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819425065 [0819425060]
Language:
English
Call no.:
P63600/3091
Type:
Conference Proceedings

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