Fabrication of a thick nickel microvalve with truncated pyramid shape

Fabrication of a thick nickel microvalve with truncated pyramid shape

Author(s):

Kang,I.-B. ( Univ.of South Australia )
Haskard,M.R. ( Univ.of South Australia )
Samaan,N.D. ( Univ.of South Australia )
Orders,P. ( Univ.of South Australia )

Publication title:

Smart materials, structures, and MEMS : 11-14 December 1996, Bangalore, India

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3321

Pub. Year:

1998

Page(from):

280

Page(to):

286

Pub. info.:

Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819427625 [0819427624]

Language:

English

Call no.:

P63600/3321

Type:

Conference Proceedings

Details

TDL ID:	ZA00019242
Series ID:	PA00000029
Conf. info. (Name):	Smart Materials, Structures, and MEMS
Conf. info. (Number):	1996
Conf. info. (Venue):	Bangalore, India
Conf. info. (Date):	1996.12.11-1996.12.14

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