Micromachining for a silicon microaccelerometer (Invited Paper)
- Author(s):
- Bhat,K.N. ( Indian Institute of Technology )
- Publication title:
- Smart materials, structures, and MEMS : 11-14 December 1996, Bangalore, India
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3321
- Pub. Year:
- 1998
- Page(from):
- 262
- Page(to):
- 273
- Pub. info.:
- Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819427625 [0819427624]
- Language:
- English
- Call no.:
- P63600/3321
- Type:
- Conference Proceedings
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