Application of anisotropic conductive films for realization of interconnects in micromechanical structures

Application of anisotropic conductive films for realization of interconnects in micromechanical structures

Author(s):

Kang,I.-B. ( Univ.of South Australia )
Haskard,M.R. ( Univ.of South Australia )
Samaan,N.D. ( Univ.of South Australia )

Publication title:

Smart materials, structures, and MEMS : 11-14 December 1996, Bangalore, India

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3321

Pub. Year:

1998

Page(from):

233

Page(to):

238

Pub. info.:

Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819427625 [0819427624]

Language:

English

Call no.:

P63600/3321

Type:

Conference Proceedings

Details

TDL ID:	ZA00019242
Series ID:	PA00000029
Conf. info. (Name):	Smart Materials, Structures, and MEMS
Conf. info. (Number):	1996
Conf. info. (Venue):	Bangalore, India
Conf. info. (Date):	1996.12.11-1996.12.14

Similar Items:

1 Conference Proceedings Assembly and interconnection technology for micromechanical structures using anisotropic conductive film Kang,I.-B., Haskard,M.R., Ju,B.K. SPIE-The International Society for Optical Engineering	7 Conference Proceedings A Low Temperature Direct Bonding Method Using an Electron-Beam Evaporated Silicon-Oxide Interlayer Park, H. W., Ju, B. K., Lee, Y. H., Park, J. H., Lee, N. Y., Koh, K. H., Shin, D. K., Kang, I. B., Samaan, N., Haskard, … MRS - Materials Research Society
2 Conference Proceedings Application of a plastic diaphragm for a silicon micropump Kang,I.-B., Son,M.-T., Haskard,M.R., Samaan,N.D., Ju,B.-K. SPIE-The International Society for Optical Engineering	8 Conference Proceedings A Study of Hermetic Glass Sealing Using a Modified Direct Bonding Method Ju, B. K., Ko, C. G., Lee, Y. H., Kang, I. B., White, P., Samaan, N., Haskard, M., Oh, M. H. MRS - Materials Research Society
3 Conference Proceedings Computer modeling techniques applied to pneumatically driven micropumps Kang,I.-B., Samaan,N.D., Haskard,M.R., Kim,N. SPIE-The International Society for Optical Engineering	9 Conference Proceedings Realization of self-diagnosis and self-calibration strategies using conventional signal processing and fuzzy approach for distributed intelligent sensor systems Rezeki,S.M.S., Chan,W., Haskard,M.R., Mulcahy,D.E., Davey,D.E. SPIE - The International Society for Optical Engineering
4 Conference Proceedings Fabrication of a thick nickel microvalve with truncated pyramid shape Kang,I.-B., Haskard,M.R., Samaan,N.D., Orders,P. SPIE-The International Society for Optical Engineering	10 Conference Proceedings Modular exponential accelerator chip based on precomputations for RSA cryptography application Ramschie,V.W., Hariz,A., Haskard,M.R. SPIE - The International Society for Optical Engineering
5 Conference Proceedings Direct bonding between spacer and field emitter array using an electron-beam-evaporated interlayer Park,H.-W., Ju,B.-K., Lee,Y.-H., Kang,I.-B., Samaan,N.D., Haskard,M.R., Park,J.-H., Oh,M.-H. SPIE-The International Society for Optical Engineering	11 Conference Proceedings MATERIAL AND RELIABILITY CONSIDERATIONS FOR ANISOTROPICALLY CONDUCTIVE ADHESIVE BASED INTERCONNECTS Dion, J., Borgesen, P., Yost, B., Lilienfeld, D. A., Li, C. -Y. MRS - Materials Research Society
6 Conference Proceedings Low-doped etch stopping for micromechanical device production Murfett,D.B., Haskard,M.R., Marriage,A.J. SPIE-The International Society for Optical Engineering	12 Conference Proceedings STRESSES IN THIN FILM MULTILAYER INTERCONNECT STRUCTURES Bruck, S. M., Knorr, D. B. Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12