Lithography on flexible substrates: a roll-to-roll high-throughput high-resolution system for low-cost production of microelectronics

Author(s):

Jain,K. ( Anvik Corp. )

Dunn,T.J. ( Anvik Corp. )

Farmiga,N. ( Anvik Corp. )

Zemel,M. ( Anvik Corp. )

Weisbecker,C. ( Anvik Corp. )

Lee,T. ( Anvik Corp. )

1 more

Publication title:

Emerging lithographic technologies II : 23-25 February 1998, Santa Clara, California

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3331

Pub. Year:

1998

Page(from):

207

Page(to):

213

Pub. info.:

Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819427762 [0819427764]

Language:

English

Call no.:

P63600/3331

Type:

Conference Proceedings