Multilayer coating and tests of a 10｡ﾟ extreme-ultraviolet lithographic camera

Author(s):

Spiller,E.A. ( Lawrence Livermore National Lab. )

Weber,F.J. ( Lawrence Livermore National Lab. )

Montcalm,C. ( Lawrence Livermore National Lab. )

Baker,S.L. ( Lawrence Livermore National Lab. )

Gullikson,E.M. ( Lawrence Berkeley National Lab. )

Underwood,J.H. ( Lawrence Berkeley National Lab. )

1 more

Publication title:

Emerging lithographic technologies II : 23-25 February 1998, Santa Clara, California

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3331

Pub. Year:

1998

Page(from):

62

Page(to):

71

Pub. info.:

Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819427762 [0819427764]

Language:

English

Call no.:

P63600/3331

Type:

Conference Proceedings