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Inspecting the microprofile and defects of optical surfaces using an atomic-force microscope

Author(s):
  • Li,J. ( Jiangxi Academy of Sciences (China) )
  • Xiao,S. ( Nanchang Univ.(China) )
  • Zhao,A. ( Jiangxi Academy of Sciences (China) )
  • Li,D. ( Tsinghua Univ.(China) )
Publication title:
Input/Output and Imaging Technologies
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3422
Pub. Year:
1998
Page(from):
270
Page(to):
273
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819428769 [0819428760]
Language:
English
Call no.:
P63600/3422
Type:
Conference Proceedings

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