Surface topography by wavelength scanning interferometry

Author(s):

• Yamaguchi,I. ( RIKEN-The Institute of Physical and Chemical Research (Japan) )
• Yamamoto,A. ( RIKEN-The Institute of Physical and Chemical Research (Japan) )
• Yano,M. ( Saitama Univ.(Japan) )

Publication title:

Laser interferometry IX : applications : 22-23 July 1998, San Diego, California

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3479

Pub. Year:

1998

Page(from):

24

Page(to):

32

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819429346 [0819429341]

Language:

English

Call no.:

P63600/3479

Type:

Conference Proceedings