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Effect of different barrier materials on antifuse performance

Author(s):
  • Ang,T.C. ( Nanyang Technological Univ.(Singapore) )
  • Tse,M.S. ( Nanyang Technological Univ.(Singapore) )
  • Chan,L.H. ( Chartered Semiconductor Manufacturing,Ltd. (Singapore) )
  • Sudijono,J.L. ( Chartered Semiconductor Manufacturing,Ltd. (Singapore) )
Publication title:
Microelectronic Manufacturing Yield, Reliability, and Failure Analysis IV
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3510
Pub. Year:
1998
Page(from):
233
Page(to):
239
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819429698 [0819429694]
Language:
English
Call no.:
P63600/3510
Type:
Conference Proceedings

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