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Novel method for fabricating waveguide grating by phase mask technique

Author(s):
  • Ma,S. ( Changchun Institute of Physics (China) )
  • Li,Y. ( Changchun Institute of Physics (China) )
  • Xu,M. ( Changchun Institute of Physics (China) )
  • Yi,Y. ( Changchun Institute of Physics (China) )
  • Lin,J. ( Changchun Institute of Physics (China) )
Publication title:
Integrated Optoelectronics II
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3551
Pub. date:
1998
Page(from):
84
Page(to):
86
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819430120 [0819430129]
Language:
English
Call no.:
P63600/3551
Type:
Conference Proceedings

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