Diffusion of arsenic and phosphorus in laser-processed-polycrystalline-silicon-thin-films

Diffusion of arsenic and phosphorus in laser-processed-polycrystalline-silicon-thin-films

Author(s):

Baumgart, H. ( Bell Laboratories )
Leamy, H.J. ( Bell Laboratories )
Trimble, L.E. ( Bell Laboratories )
Doherty, C.J. ( Bell Laboratories )
Celler, G.K. ( Bell Laboratories )

Publication title:

Grain boundaries in semiconductors : proceedings of the Materials Research Society annual meeting, November 1981, Boston Park Plaza Hotel, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposia proceedings

Ser. no.:

5

Pub. Year:

1982

Page(from):

311

Page(to):

316

Pub. info.:

New York: North-Holland

ISSN:

02729172

ISBN:

9780444006974 [0444006974]

Language:

English

Call no.:

M23500/5

Type:

Conference Proceedings

Details

TDL ID:	ZA00019226
Series ID:	PA00000010
Conf. info. (Name):	Materials Research Society Annual Meeting ; Symposium on grain boundaries in semiconductors
Conf. info. (Number):	1981
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1981.11.16-1981.11.19

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