Blank Cover Image

SILICON BASED SURFACE ACOUSTIC WAVE GAS SENSORS

Author(s):
Publication title:
Sensors and sensory systems for an electronic nose
Title of ser.:
NATO ASI series. Series E, Applied sciences
Ser. no.:
212
Pub. Year:
1992
Page(from):
131
Page(to):
145
Pages:
15
Pub. info.:
Dordrecht: Kluwer Academic Publishers
ISSN:
0168132X
ISBN:
9780792316930 [0792316932]
Language:
English
Call no.:
N11482/212
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Temperature-stabilized silicon-based surface-acoustic-wave gas sensors for the detection of solvent vapors

Bender,S., Mokwa,W.

SPIE - The International Society for Optical Engineering
7 Conference Proceedings Polarization-based folded Sagnac fiber optic sensor array for acoustic waves

Kino, G.S., Vakoc, B.J., Digonnet, M.J.F.

SPIE-The International Society for Optical Engineering
2 Conference Proceedings Oriented Coatings of Silicalite-1 for Gas Sensor Applications

Koegler, J. H., Zandbergen, H. W., Harteveld, J. L. N., Nieuwenhuizen, M. S., Jansen, J. C., Bekkum, H. van

Elsevier
8 Conference Proceedings Parameter Optimization of a Microfabricated Surface-Acoustic-Wave Sensor for Inert Gas Detection

Ahuja, S., DiVenere, A., Ross, C., Chien, H. T., Raptis, A. C.

MRS - Materials Research Society
3 Conference Proceedings III-Nitride Based Ultraviolet Surface Acoustic Wave Sensors

CIPLYS, D., SEREIKA, A., RIMEIKA, R., GASKA, R., SHUR, M., YANG, J., KHAN, M. ASIF

Kluwer Academic Publishers
9 Conference Proceedings GaN-based Surface Acoustic Wave Devices for Optoelectronics Applica- tions

Ciplys, D., Shur, M.S., Gaska, R., Rimeika, R., Sereika, A., Deng, J., Khan, A., Yang, J.

Electrochemical Society
4 Conference Proceedings Silicon-based interferometric sensor with phase modulation driven by surface acoustic waves

Bonnotte,E., Gorecki,C., Toshiyoshi,H., Kawakatsu,H.

SPIE-The International Society for Optical Engineering
10 Conference Proceedings Real-time monitoring of thickness of silicon membrane during wet etching using a novel surface acoustic wave sensor

Lee, C. Y., Wu, T. T., Chen, Y. Y., Cheng, Y. C., Chen, W. J., Pao, S. Y., Chang, P. Z., Chen, P. H., Yen, K. H., Xiao, …

SPIE - The International Society of Optical Engineering
5 Conference Proceedings Internal standardization and calibration of surface acoustic wave chemical sensor systems

Shaffer,R.E., Cygan,M.T., Hart,S.J., Chung,R., Nguyen,V., Dilella,D., McGill,R.A.

SPIE - The International Society for Optical Engineering
11 Conference Proceedings Surface acoustic wave based ozone sensor with an InOx/Si3N4/36°YX LiTaO3 structure

Fechete, A. C., Ippalito, S. J., Kalantar-Zadeh, K., Wlodarski, W., Halland, A. S.

SPIE - The International Society of Optical Engineering
6 Conference Proceedings Surface and Interfacial Properties of Surface Acoustic Wave Gas Sensors

McGill, R. Andrew, Grate, J. W., Anderson, Mark R.

American Chemical Society
12 Conference Proceedings A gas micromechanical sensor based on surface plasmons resonance

J. Hastanin, Y. Renotte, K. Fleury-Frenette, J. M. Defise, S. Habraken

Society of Photo-optical Instrumentation Engineers
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12