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Mesoporous Oxides as Low Dielectric Constant Materials

Author(s):
Publication title:
Proceedings : 1999 International Symposium on Microelectronics : 26-28 October 1999, Chicago, Illinois
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3906
Pub. Year:
1999
Page(from):
189
Page(to):
194
Pub. info.:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780930815585 [0930815580]
Language:
English
Call no.:
P63600/3906
Type:
Conference Proceedings

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