Characterization of a New Resistor System for Advanced Multilayer Technology Materials
- Author(s):
- Anderson,David K. ( DuPont Electronic Materials )
- Smith,J.D.
- Needes,C.R.S.
- Horowitz,S.J.
- Publication title:
- Proceedings : 1999 International Symposium on Microelectronics : 26-28 October 1999, Chicago, Illinois
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3906
- Pub. Year:
- 1999
- Page(from):
- 118
- Page(to):
- 123
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780930815585 [0930815580]
- Language:
- English
- Call no.:
- P63600/3906
- Type:
- Conference Proceedings
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