Blank Cover Image

Improvement in diffusion barrier properties of PECVD W-N thin film by low-energy BF2+ implantation

Author(s):
Publication title:
In-line characterization, yield reliability, and failure analysis in microelectronics manufacturing : 19-21 May 1999, Edinburgh, Scotland
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3743
Pub. Year:
1999
Page(from):
324
Page(to):
331
Pub. info.:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819432230 [0819432237]
Language:
English
Call no.:
P63600/3743
Type:
Conference Proceedings

Similar Items:

Kim,Y.T., Kim,D.J., Lee,S., Park,Y.K., Kim,I.-S., Park,J.-W.

SPIE - The International Society for Optical Engineering

Sung, D. Y., Kim, I., Lee, M. G., Yang, B., Yang, J. M., Ko, J. K.

Trans Tech Publications

Kim,Y.T., Kim,D.J., Lee,C.W., Park,J.-W.

SPIE-The International Society for Optical Engineering

Sung, D. Y., Kim, I., Lee, M. G., Park, N. J., Yang, B., Yang, J. M., Ko, J. K.

Trans Tech Publications

Kim, D.J., Sim, H.S., Kim, Y.T., Park, J.-W.

Electrochemical Society

Kim, H.J., Song, I.C., Sim, J.H., Kim, D.J., Ihm, Y.E., Choo, W.K.

Trans Tech Publications

Lai, L.W., Chang, C.C., Chen, J.S., Lin, Y.K.

Electrochemical Society

Nam, I.-H., Hong, S.I., Sim, J.S., Park, B.-G., Lee, J.D., Lee, S.-W., Kang, M.-S., Kim, Y.-W., Suh, K.-P.

Electrochemical Society

Kim, D. J., Kim, I-S., Kim, Y. T., Park, J-W.

MRS - Materials Research Society

11 Conference Proceedings PREPARATION OF PZT THIN FILMS BY ECR PECVD

Kim, J. W., Kim, S. T., Chung, S. W., Shin, J. S., No, K. S., Wee, D. M., Lee, W. J.

MRS - Materials Research Society

Bilodeau, S.M., Borovik, A.S., Ebbing, A.A., Vestyck, D.J., Xu, C., Roeder, J.F., Baum, T.H.

Materials Research Society

Kim, Dong Joon, Kim, Yong Tae, Park, Jong-Wan

MRS - Materials Research Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12