Coherent multiple imaging by means of pupil plane filtering

Coherent multiple imaging by means of pupil plane filtering

Author(s):

Erdelyi,M. ( Rice Univ. )

Publication title:

Optical microlithography XII : 17-19 March 1999, Santa Clara, California

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3679

Pub. Year:

1999

Vol.:

Part2

Page(from):

762

Page(to):

771

Pub. info.:

Bellingham, Wash., USA: SPIE - The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819431530 [0819431532]

Language:

English

Call no.:

P63600/3679

Type:

Conference Proceedings

Details

TDL ID:	ZA00019002
Series ID:	PA00000029
Conf. info. (Name):	SPIE Advanced Lithography : Optical microlithography
Conf. info. (Number):	1999 : 12th
Conf. info. (Venue):	Santa Clara, CA, USA
Conf. info. (Date):	1999.03.17-1999.03.19

Similar Items:

1 Conference Proceedings Enhanced microlithography using coherent multiple imaging Erdelyi,M., Osvay,K., Bor,Z., Wilson,W.L., Smayling,M.C., Tittel,F.K. SPIE - The International Society for Optical Engineering	7 Conference Proceedings High-resolution microlithography applications of deep-UV excimer lasers (Invited Paper) Tittel,F.K., Cavallaro,J.R., Erdelyi,M., Szabo,G., Bor,Zs, Smayling,M.C. SPIE-The International Society for Optical Engineering
2 Conference Proceedings Present and future trends in excimer-laser-based microlithography Tittel,F.K., Erdelyi,M., Horvath,Z.L., Kroyan,A., Wilson,W.L., Smayling,M.C., Bor,Z., Szabo,G. SPIE-The International Society for Optical Engineering	8 Conference Proceedings Enhanced microlithography using coated objectives and image duplication Erdelyi,M., Bor,Z., Szabo,G., Tittel,F.K. SPIE-The International Society for Optical Engineering
3 Conference Proceedings Applications of nondiffracting beams Bor,Z., Erdelyi,M., Horvath,Z.L., Szabo,C., Osvay,K., Wilson,W.L.,Jr., Tittel,F.K. SPIE - The International Society for Optical Engineering	9 Conference Proceedings Generation of zero-order Bessel beams with Fabry-Perot interferometer Horvath,Z.L., Erdelyi,M., Szabo,G., Bor,Zs., Tittel,F.K., Cavallaro,J.R. SPIE-The International Society for Optical Engineering
4 Conference Proceedings Integrated CAD framework linking VLSI layout editors and process simulators Sengupta,C., Erdelyi,M., Bor,Z., Cavallaro,J.R., Smayling,M.C., Szabo,G., Tittel,F.K., Wilson,W.L. SPIE-The International Society for Optical Engineering	10 Conference Proceedings Interferometric phase shift technique for high-resolution deep-UV microlithography F.K. Tittel, J.R. Cavallaro, M. Kido, M.C. Smayling, G. Szabó Society of Photo-optical Instrumentation Engineers
5 Conference Proceedings Sub-quarter-micrometer contact hole fabrication using annular illumination Erdelyi,M., Bor,Z., Szabo,G., Cavallaro,J.R., Smayling,M.C., Tittel,F.K., Wilson,W.L. SPIE-The International Society for Optical Engineering	11 Conference Proceedings Coping with the impact of lens aberrations in the context of wavefront engineering Kroyan,A., Levenson,M.D., Tittel,F.K. SPIE-The International Society for Optical Engineering
6 Conference Proceedings Optical microlithography with nearly nondiffracting beams Erdelyi,M., Horvath,Z.L., Bor,Z., Szabo,G., Cavallaro,J.R., Smayling,M.C., Tittel,F.K. SPIE-The International Society for Optical Engineering	12 Conference Proceedings Imaging in biologica l tissues by means of diffraction tomography with photon density waves A.H. Hielscher, F.K. Tittel, S.L. Jacques Society of Photo-optical Instrumentation Engineers

1

2

3

4

5

6

7

8

9

10

11

12