Blank Cover Image

Pattern asymmetries in phase-edge imaging

Author(s):
Publication title:
Optical microlithography XII : 17-19 March 1999, Santa Clara, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3679
Pub. Year:
1999
Vol.:
Part2
Page(from):
567
Page(to):
581
Pub. info.:
Bellingham, Wash., USA: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819431530 [0819431532]
Language:
English
Call no.:
P63600/3679
Type:
Conference Proceedings

Similar Items:

Fritze,M., Wyatt,P.W., Astolfi,D.K., Davis,P., Curtis,A.V., Preble,D.M., Cann,S.G., Denault,S., Chan,D., Shaw,J.C., …

SPIE - The International Society for Optical Engineering

Chan,D., Novak,J.W., Fritze,M.

SPIE-The International Society for Optical Engineering

Fritze, M., Tyrrell, B., Cann, S.G., Carney, C., Blachowicz, B.A., Brzozowy, D., Kocab, T., Bowdoin, S., Rhyins, P.D., …

SPIE-The International Society for Optical Engineering

Carla M. Nelson-Thomas, Susan C. Palmateer, Anthony R. Forte, Susan G. Cann, S. Deneault

SPIE - The International Society of Optical Engineering

Fritze,M., Burns,J.M., Wyatt,P.W., Astolfi,D.K., Forte,T., Yost,D., Davis,P., Curtis,A.V., Preble,D.M., Cann,S.G., …

SPIE - The International Society for Optical Engineering

Wang, A.P., Wang, S.G.

SPIE - The International Society of Optical Engineering

Palmateer,S.C., Cann,S.G., Curtin,J.E., Doran,S.P., Eriksen,L.M., Forte,A.R., Kunz,R.R., Lyszczarz,T.M., Stern,M.B., …

SPIE-The International Society for Optical Engineering

M. Jiang, C. L. Wyatt, G. Wang

Society of Photo-optical Instrumentation Engineers

Fritze,M., Tyrrell,B., Astolfi,D.K., Davis,P., Wheeler,B., Mallen,R., Jarmolowicz,J., Cann,S.G., Chan,D.Y., Rhyins,P.D., …

SPIE-The International Society for Optical Engineering

Korzennik, S.G.

ESA Publications Division

Fritze, M., Mallen, R.D., Wheeler, B., Yost, D., Snyder, J.P., Kasprowicz, B.S., Eynon, B.G., Liu, H.-Y.

SPIE-The International Society for Optical Engineering

Burgiss,S.G., Whitaker,R.T., Abidi,M.A.

SPIE-The International Society for Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12