High-precision micro-optic elements by wafer-scale replication on arbitrary substrates
- Author(s):
- Dannberg,P. ( Fraunhofer-Institut fur Angewandte Optik und Feinmechanik )
- Bierbaum,R.
- Erdmann,L.
- Krehl,A.
- Brauer,A.H.
- Publication title:
- Optical fabrication and testing : 26-28 May 1999, Berlin, Germany
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3739
- Pub. Year:
- 1999
- Page(from):
- 206
- Page(to):
- 212
- Pub. info.:
- Bellingham, WA: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819432131 [081943213X]
- Language:
- English
- Call no.:
- P63600/3739
- Type:
- Conference Proceedings
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