Morphology and mechanical properties of oblique angle columnar thin films
- Author(s):
- Knepper,R. ( The Pennsylvania State Univ. )
- Messier,R.F.
- Publication title:
- Complex mebiums : 30 July-1 August 2000, San Diego, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4097
- Pub. Year:
- 2000
- Page(from):
- 291
- Page(to):
- 298
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819437426 [0819437425]
- Language:
- English
- Call no.:
- P63600/4097
- Type:
- Conference Proceedings
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