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Amorphous-silicon thin film transistor with two-step exposure process

Author(s):
Chen,P.-F. ( Industrial Technology Research Institute )
Chen,J.-H.
Chen,D.-I.
Sung,H.-J.
Hwang,J.-W.
Lu,I.-M.
1 more
Publication title:
Display technologies III : 26-27 July 2000, Taipei, Taiwan
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4079
Pub. Year:
2000
Page(from):
217
Page(to):
220
Pub. info.:
Bellingham, Wash., USA: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819437181 [0819437182]
Language:
English
Call no.:
P63600/4079
Type:
Conference Proceedings

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