Micromachined CMOS magnetic field sensor with ferromagnetic actuation

Author(s):

• Latorre,L. ( LIRMM/Univ.de Montpellier )
• Beroulle,V.
• Bertrand,Y.
• Nouet,P.
• Salesse,I.

Publication title:

Design, Test, Integration, and Packaging of MEMS/MOEMS : 9-11 May 2000, Paris, France

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4019

Pub. Year:

2000

Page(from):

398

Page(to):

405

Pub. info.:

Bellingham, Wash.: SPIE - The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819436450 [0819436453]

Language:

English

Call no.:

P63600/4019

Type:

Conference Proceedings