High-thermal-impedance beams for suspended MEMS
- Author(s):
- Mir,S. ( TIMA Lab. )
- Charlot,B.
- Parrnin,F.
- Veychard,D.
- Publication title:
- Design, Test, Integration, and Packaging of MEMS/MOEMS : 9-11 May 2000, Paris, France
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4019
- Pub. Year:
- 2000
- Page(from):
- 99
- Page(to):
- 107
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819436450 [0819436453]
- Language:
- English
- Call no.:
- P63600/4019
- Type:
- Conference Proceedings
Similar Items:
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
3
Conference Proceedings
The Capture of Suspended Particles as a Crystallising Phase Advances into its Melt-The Influence of Reduced Gravity, the Ambient g-Jitter of MIR and Forced …
ESA Publications Division |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
10
Conference Proceedings
X-ray Diffraction Characterization of Suspended Structures for MEMS Applications
Materials Research Society |
SPIE - The International Society for Optical Engineering |
ESA Publications Division |
SPIE - The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |