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Progress toward developing high-performance 193-nm single-layer positive resist based on functionalized poly(norbornenes)

Author(s):
Varanasi,P.R. ( IBM Microelectronics Div. )
Jordhamo,G.M.
Lawson,M.C.
Chen,K.-J.
Brunsvold,W.R.
Hughes,T.
Keller,R.
Khojasteh,M.
Li,W.
Allen,R.D.
Ito,H.
Opitz,J.
Truong,H.D.
Wallow,T.I.
9 more
Publication title:
Advances in resist technology and processing XVII : 28 February - 1 March 2000, Santa Clara, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3999
Pub. Year:
2000
Vol.:
Part2
Page(from):
1157
Page(to):
1162
Pub. info.:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819436177 [0819436178]
Language:
English
Call no.:
P63600/3999
Type:
Conference Proceedings

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