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Growth of SiC thin films on (100) and (111) silicon by pulsed laser deposition combined with a vacuum anealing process

Author(s):
Huang, J.
Wang, L.
Wen, J.
Wang, Y.
Lin, C.
Zetterling, C-M.
Ostling, M.
2 more
Publication title:
Wide-bandgap semiconductors for high-power, high-frequency, and high temperature applications--1999 : symposium held April 5-8, 1999, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
572
Pub. Year:
1999
Page(from):
207
Pub. info.:
Warrendale, PA: MRS-Materials Research Society
ISSN:
02729172
ISBN:
9781558994799 [1558994793]
Language:
English
Call no.:
M23500/572
Type:
Conference Proceedings

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