Preparation of conductive tungsten carbide layers for SiC high-temperature applications

Preparation of conductive tungsten carbide layers for SiC high-temperature applications

Author(s):

Romanus, H.

Publication title:

Wide-bandgap semiconductors for high-power, high-frequency, and high temperature applications--1999 : symposium held April 5-8, 1999, San Francisco, California, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

572

Pub. Year:

1999

Page(from):

99

Pub. info.:

Warrendale, PA: MRS-Materials Research Society

ISSN:

02729172

ISBN:

9781558994799 [1558994793]

Language:

English

Call no.:

M23500/572

Type:

Conference Proceedings

Details

TDL ID:	ZA00018972
Series ID:	PA00000011
Conf. info. (Name):	Wide-Bandgap Semiconductors for High-Power, High-Frequency and High-Temperature Applications-1999 : Symposium
Conf. info. (Number):	1999
Conf. info. (Venue):	San Francisco, CA, USA
Conf. info. (Date):	1999.04.05-1999.04.08

Similar Items:

1 Conference Proceedings Growth of SiC Layers on(111)Si by Solid Source Molecular Beam Epitaxy Pezoldt,J., Stauden,T., Cimalla,V., Ecke,G., Romanus,H., Eichhorn,G. Trans Tech Publications	7 Conference Proceedings Analysis of Reflection High Energy Electron Diffraction Pattern of Silicon Carbide Grown on Silicon Teichert, G., Pezoldt, J., Cimalla, V., Nennewitz, O., Spiess, L. MRS - Materials Research Society
2 Conference Proceedings Carbonization Induced Change of Polarity for MBE Grown 3C-SiC/Si(111) Pezoldt, J., Schroeter, B., Cimalla, V., Stauden, T., Goldhahn, R., Romanus, H., Spiess, L. Trans Tech Publications	8 Conference Proceedings The Measurement of the Thickness of Thin SiC Layers on Silicon Cimalla,V., Scheiner,J., Ecke,G., Friedrich,M., Goldhahn,R., Zahn,D.R.T., Pezoldt,J. Trans Tech Publications
3 Conference Proceedings High-temperature stable WSi2-contacts on p-6H-silicon carbide Erler, F., Romanus, H., Lindner, J. K, N., Spiess, L. MRS-Materials Research Society	9 Conference Proceedings Rapid Thermal Annealing of Tungsten Silicide Films Fabricius, A., Nennewitz, O., Spiess, L., Cimalla, V., Pezoldt, J. MRS - Materials Research Society
4 Conference Proceedings High-Resolution XRD Investigations of the Strain Reduction in 3C-SiC Thin Films Grown on Si (111) Substrates Weih, P., Cimalla, V., Forster, C., Pezoldt, J., Stauden, Th., Spiess, L., Romanus, H., Hermann, M., Eickhoff, M., … Trans Tech Publications	10 Conference Proceedings Low Energy Ion Modification of 3C-SiC Surfaces Forster, C., Kosiba, R., Ecke, G., Cimalla, V., Ambacher, O., Pezoldt, J. Trans Tech Publications
5 Conference Proceedings Dielectric Function of 'Narrow' Band Gap InN Goldhahn, R., Shokhovets, S., Cimalla, V., Spiess, L., Ecke, G., Ambacher, O., Furthmuller, J., Bechstedt, F., Lu, H., … Materials Research Society	11 Conference Proceedings Etching of SiC with Fluorine ECR Plasma Foerster, Ch., Cimalla, V., Kosiba, R., Ecke, G., Weih, P., Ambacher, O., Pezoldt, J. Trans Tech Publications
6 Conference Proceedings Investigation of Polymorphism and Estimation of Lattice Constants of SiC Epilayers by Four Circle X-Ray Diffraction Romanus,H., Teichert,G., Spiess,L. Trans Tech Publications	12 Conference Proceedings Structure and Composition of 3C-SiC:Ge Alloys Grown on Si (111) Substrates by SSMBE Weih, P., Cimalla, V., Stauden, Th., Kosiba, R., Spies, L., Romanus, H., Gubisch, M., Bock, W., Freitag, Th., Fricke, … Trans Tech Publications

1

2

3

4

5

6

7

8

9

10

11

12