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Application of Triaryl Phosphate to Photosensitive Materials: Photoreaction Mechanism of Triaryl Phosphate

Author(s):
Publication title:
Polymeric materials for microelectronic applications : science and technology
Title of ser.:
ACS symposium series
Ser. no.:
579
Pub. Year:
1994
Page(from):
139
Pub. info.:
Washington, DC: American Chemical Society
ISSN:
00976156
ISBN:
9780841230552 [0841230552]
Language:
English
Call no.:
A05800/579
Type:
Conference Proceedings

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