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THE STUDY OF SEAM LINE DEFECTS IN SILICON-ON-OXIDE BY MERGED EPITAXIAL LATERAL OVERGROWTH

Author(s):
Publication title:
Mechanisms of thin film evolution
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
317
Pub. date:
1994
Page(from):
257
Pub. info.:
Pittsburgh, PA: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992160 [1558992162]
Language:
English
Call no.:
M23500/317
Type:
Conference Proceedings

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